Equipment

  • Dedicated high performance computing facility for large scale FDTD calculations
  • Automatic nanometer positioning system for fiber to chip coupling
  • High resolution optical spectrum analyzers
  • High performance tunable laser sources with 1260 nm – 1640 nm wavelength range
  • Optical monochromator (1/4m)
  • Q-switched Nd:YAG laser and THG pumped OPO (355 nm – 2.5 µm)
  • Optical slab waveguide attenuation measurement station
  • Waveguide far- and near-field analysis
  • ATR spectrometer (refractive index and thickness measurement of thin films)
  • Surface plasmon spectrometer
  • High electric field poling setup (corona and contact) with in-situ second-harmonic-generation monitoring
  • Teng-Man measurement setup (Pockels effect)
  • Maker – Fringe – measurement setup
  • Luminescence measurement station
  • Clean room (class 100)
    • DI-water
    • Spin-Coater
    • Vacuum drying ovens
    • Mask aligner
    • Electron beam evaporator (chrome, gold, silver, aluminum)
    • Thermal evaporator (gold)
    • RF and DC sputtering
    • Surface profilometer (Dektak)
    • UV-VIS-NIR absorption spectrometer
  • PECVD
  • Atomic force microscope
  • Microwave measurement station in the X- and Ka-Band, at low temperatures and high magnetic fields
  • Apparatus for measurement of magnetotransportproperties in the temperature range 1.6K < T < 400K
  • Broadand dielectric measurement system
  • InGaAs – NIR camera
  • High resolution B/W camera system